"Symbiotic simulation for optimisation of tool operations in semiconductor ..."

Heiko Aydt et al. (2011)

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DOI: 10.1109/WSC.2011.6147922

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-07

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Heiko Aydt, Stephen John Turner, Wentong Cai, Boon-Ping Gan:
Symbiotic simulation for optimisation of tool operations in semiconductor manufacturing. WSC 2011: 2093-2104

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