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"Simulation-based framework to automated wet-etch station scheduling ..."

Adrián M. Aguirre, Vanina G. Cafaro, Carlos A. Méndez (2011)

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DOI: 10.1109/WSC.2011.6147896

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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  - https://dblp.org/rec/conf/wsc/AguirreCM11
Adrián M. Aguirre, Vanina G. Cafaro, Carlos A. Méndez:
Simulation-based framework to automated wet-etch station scheduling problems in the semiconductor industry. WSC 2011: 1821-1833

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