"Investigation of gate oxide short in FinFETs and the test methods for ..."

Chen-Wei Lin, Mango Chia-Tso Chao, Chih-Chieh Hsu (2013)

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DOI: 10.1109/VTS.2013.6548929

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  - https://dblp.org/rec/conf/vts/LinCH13
Chen-Wei Lin, Mango Chia-Tso Chao, Chih-Chieh Hsu:
Investigation of gate oxide short in FinFETs and the test methods for FinFET SRAMs. VTS 2013: 1-6

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