"2D Materials in the BEOL."

C. H. Naylor et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185307

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-31

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C. H. Naylor, Kirby Maxey, C. Jezewski, K. P. O'Brien, A. V. Penumatcha, M. S. Kavrik, B. Agrawal, C. V. Littlefield, J. Lux, B. Barley, Justin R. Weber, A. Sen Gupta, C. J. Dorow, N. Arefin, S. King, R. Chebiam, J. Plombon, S. B. Clendenning, U. E. Avci, Mauro J. Kobrinsky, M. Metz:
2D Materials in the BEOL. VLSI Technology and Circuits 2023: 1-2

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