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"Comprehensive 300 mm process for Silicon spin qubits with modular integration."
A. Elsayed et al. (2023)
- A. Elsayed, Clement Godfrin, Nard I. Dumoulin Stuyck, M. M. K. Shehata, Stefan Kubicek, S. Massar, Yann Canvel, Julien Jussot, Andriy Hikavyy, Roger Loo
, George Simion, Massimo Mongillo, D. Wan, Bogdan Govoreanu, R. Li, Iuliana P. Radu, P. Van Dorpe, Kristiaan De Greve:
Comprehensive 300 mm process for Silicon spin qubits with modular integration. VLSI Technology and Circuits 2023: 1-2
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