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"Invited Paper: Extending Resolution Limits of IC Fabrication Technology: ..."

Omkaram Nalamasu et al. (2001)

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DOI: 10.1109/ICVD.2001.902701

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Omkaram Nalamasu, Pat G. Watson, Raymond A. Cirelli, Jeff Bude, Isik C. Kizilyalli, Ross A. Kohler:
Invited Paper: Extending Resolution Limits of IC Fabrication Technology: Demonstration by Device Fabrication and Circuit Performance. VLSI Design 2001: 469

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