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"Invited Paper: Extending Resolution Limits of IC Fabrication Technology: ..."
Omkaram Nalamasu et al. (2001)
- Omkaram Nalamasu, Pat G. Watson, Raymond A. Cirelli, Jeff Bude, Isik C. Kizilyalli, Ross A. Kohler:
Invited Paper: Extending Resolution Limits of IC Fabrication Technology: Demonstration by Device Fabrication and Circuit Performance. VLSI Design 2001: 469
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