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"Electrical Modeling of Lithographic Imperfections."
Tuck-Boon Chan, Rani S. Ghaida, Puneet Gupta (2010)
- Tuck-Boon Chan, Rani S. Ghaida, Puneet Gupta:
Electrical Modeling of Lithographic Imperfections. VLSI Design 2010: 423-428
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