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"Self-dependent Equivalent Circuit Modeling of Electrostatic Comb ..."
Toshiyuki Tsuchiya et al. (2011)
- Toshiyuki Tsuchiya
, Hiroyuki Tokusaki, Yoshikazu Hirai
, Koji Sugano, Osamu Tabata:
Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS. VLSI-SoC (Selected Papers) 2011: 94-109
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