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"Flare reduction in EUV Lithography by perturbation of wire segments."

Sudipta Paul, Pritha Banerjee, Susmita Sur-Kolay (2015)

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DOI: 10.1109/VLSI-SOC.2015.7314383

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-02

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Sudipta Paul, Pritha Banerjee, Susmita Sur-Kolay:
Flare reduction in EUV Lithography by perturbation of wire segments. VLSI-SoC 2015: 7-12

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