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"Triple patterning lithography-aware detailed routing ensuring via layer ..."

Hua-Yi Wu, Shao-Yun Fang (2018)

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DOI: 10.1109/VLSI-DAT.2018.8373273

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-13

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Hua-Yi Wu, Shao-Yun Fang:
Triple patterning lithography-aware detailed routing ensuring via layer decomposability. VLSI-DAT 2018: 1-4

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