"Modeling and simulation of variable thickness based stepped MEMS ..."

Deep Kishore Parsediya, Jawar Singh, Pavan Kumar Kankar (2014)

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DOI: 10.1109/ISVDAT.2014.6881055

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Deep Kishore Parsediya, Jawar Singh, Pavan Kumar Kankar:
Modeling and simulation of variable thickness based stepped MEMS cantilever designs for biosensing and pull-in voltage optimization. VDAT 2014: 1-2

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