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"Optimally Scheduling Single-Arm Multicluster Tools for Manufacturing ..."

GengHong Wang et al. (2023)

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DOI: 10.1109/SMC53992.2023.10394546

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-13

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GengHong Wang, Qinghua Zhu, Yan Hou, Yan Qiao, NaiQi Wu, MengChu Zhou:
Optimally Scheduling Single-Arm Multicluster Tools for Manufacturing Hybrid-Type Wafers. SMC 2023: 3379-3384

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