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"Feedback control design for cluster tools with wafer residency time ..."

Chulhan Kim, Tae-Eog Lee (2012)

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DOI: 10.1109/ICSMC.2012.6378261

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-14

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Chulhan Kim, Tae-Eog Lee:
Feedback control design for cluster tools with wafer residency time constraints. SMC 2012: 3063-3068

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