"Modeling and analysis using Petri nets for semiconductor fabrication."

MuDer Jeng, Xiaolan Xie (1998)

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DOI: 10.1109/ICSMC.1998.725494

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-07

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MuDer Jeng, Xiaolan Xie:
Modeling and analysis using Petri nets for semiconductor fabrication. SMC 1998: 692-697

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