"Qualitative analysis and deadlock prevention of a real-world IC wafer ..."

MuDer Jeng, Xiaolan Xie (1998)

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DOI: 10.1109/ICSMC.1998.725457

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-07

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MuDer Jeng, Xiaolan Xie:
Qualitative analysis and deadlock prevention of a real-world IC wafer fabrication system. SMC 1998: 475-480

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