Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Performance evaluation of the thin film area in an IC wafer fabrication ..."

MuDer Jeng, Chi Liang Chuang, WenYuan Hung (1998)

> Home

Details and statistics

DOI: 10.1109/ICSMC.1998.726477

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-07

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/smc/JengCH98
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/smc/JengCH98
MuDer Jeng, Chi Liang Chuang, WenYuan Hung:
Performance evaluation of the thin film area in an IC wafer fabrication system using Petri nets. SMC 1998: 3094-3099

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.