"Systematic MEMS ASIC design flow using the example of an acceleration sensor."

Jenny Klaus, Roman Paris, Ralf Sommer (2016)

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DOI: 10.1109/SMACD.2016.7520730

access: closed

type: Conference or Workshop Paper

metadata version: 2018-08-30

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Jenny Klaus, Roman Paris, Ralf Sommer:
Systematic MEMS ASIC design flow using the example of an acceleration sensor. SMACD 2016: 1-4

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