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"Parasitic Extraction Methodology for MEMS Sensors with Active Devices."
Axel Hald et al. (2019)
- Axel Hald, Robert Wolf, Johannes Seelhorst, Jürgen Scheible, Jens Lienig, Stefan Tibus, Mike Schwarz:
Parasitic Extraction Methodology for MEMS Sensors with Active Devices. SMACD 2019: 221-224
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