"Is overlay error more important than interconnect variations in double ..."

Kwangok Jeong, Andrew B. Kahng, Rasit Onur Topaloglu (2009)

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DOI: 10.1145/1572471.1572474

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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Kwangok Jeong, Andrew B. Kahng, Rasit Onur Topaloglu:
Is overlay error more important than interconnect variations in double patterning? SLIP 2009: 3-10

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