"Robust control of a long-stroke precision stage: With applications to ..."

K. A. Wang, Y. Y. Chen, Fu-Cheng Wang (2015)

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DOI: 10.1109/SII.2015.7404983

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-11

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K. A. Wang, Y. Y. Chen, Fu-Cheng Wang:
Robust control of a long-stroke precision stage: With applications to fresnel zone plane fabrication. SII 2015: 229-234

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