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"Modeling and Simulation Method for a Belt-Driven SiliconWafer Transfer ..."
Yoshiro Fukui, Yusuke Murayama (2023)
- Yoshiro Fukui, Yusuke Murayama:
Modeling and Simulation Method for a Belt-Driven SiliconWafer Transfer Robot Considering Static Friction. SICE 2023: 730-735
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