"Design of a Novel Piezo-Driven XYZ Compliant Parallel ..."

Zeyi Wu, Qingsong Xu (2018)

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DOI: 10.1109/ROBIO.2018.8665107

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Zeyi Wu, Qingsong Xu:
Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage. ROBIO 2018: 1496-1501

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