"Optimization of SiON/SiOx structures fabrication process for optical ..."

L'ubos Podlucký et al. (2020)

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DOI: 10.1109/RADIOELEKTRONIKA49387.2020.9092431

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-02

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  - conf/radioelektronika/PodluckyVCRKU20
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  - https://dblp.org/rec/conf/radioelektronika/PodluckyVCRKU20
L'ubos Podlucký, Marián Vojs, Jozef Chovan, Vlastimil Rehácek, Jaroslav Kovác, Frantisek Uherek:
Optimization of SiON/SiOx structures fabrication process for optical waveguides. RADIOELEKTRONIKA 2020: 1-5

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