"High-performance Si photonics interposer featuring RF travelling-wave ..."

Yan Yang et al. (2015)

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DOI: 10.1364/OFC.2015.TU2A.6

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-09

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Yan Yang, Qing Fang, Mingbin Yu, Xiaoguang Tu, Junfeng Song, Rusli, Guo-Qiang Lo:
High-performance Si photonics interposer featuring RF travelling-wave electrode (TWE) via Cu-BEOL. OFC 2015: 1-3

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