"1 Million Intrinsic Q-Factor Microring Resonators From PVD Aluminum ..."

Amy S. K. Tong et al. (2024)

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type: Conference or Workshop Paper

metadata version: 2024-07-11

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Amy S. K. Tong, Wing Wai Chung, Charmaine Goh, Landobasa Y. M. Tobing, Leh Woon Lim, Yuriy A. Akimov, Zhan Jiang Quek, Aravind P. Anthur, Jia Sheng Goh, Huamao Lin, Navab Singh, Qingxin Zhang, Doris Keh Ting Ng:
1 Million Intrinsic Q-Factor Microring Resonators From PVD Aluminum Nitride on SiO2-on-Si Substrate. OFC 2024: 1-3

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