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"A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated ..."
Sandeep S. Saseendran et al. (2019)
- Sandeep S. Saseendran, Tangla D. Kongnyuy, Bruno Figeys, Federico Buja, Benedetto Troia, Sarp Kerman, Aleksandrs Marinins, Roelof Jansen, Xavier Rottenberg, Deniz Sabuncuoglu Tezcan, Philippe Soussan:
A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated Photonics with Low Loss and Low Process Induced Phase Variation. OFC 2019: 1-3
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