"Low-loss and Thermal-stable Ta2O5 Photonic Platform with Low-temperature ..."

Zhaoting Geng et al. (2024)

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type: Conference or Workshop Paper

metadata version: 2024-06-06

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Zhaoting Geng, Weiren Cheng, Zhenyu Liu, Mingjian You, Xiaolun Yu, Pengzhuo Wu, Ning Ding, Xingyu Tang, Yihan Liu, Li Shen, Qiancheng Zhao:
Low-loss and Thermal-stable Ta2O5 Photonic Platform with Low-temperature Process. OFC 2024: 1-3

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