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"Micromechanical accelerometers based on surface acoustic waves."
Dmitry Lukyanov et al. (2014)
- Dmitry Lukyanov, Sergey Yu. Shevchenko, Alexander S. Kukaev, E. Filippova, D. Safronov:
Micromechanical accelerometers based on surface acoustic waves. NORCHIP 2014: 1-4
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