"3-axis high Q MEMS accelerometer with simultaneous damping control."

Lavinia Ciotirca et al. (2016)

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DOI: 10.1109/NEWCAS.2016.7604787

access: closed

type: Conference or Workshop Paper

metadata version: 2020-02-03

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Lavinia Ciotirca, Olivier Bernal, Hélène Tap, Jerome Enjalbert, Thierry Cassagnes:
3-axis high Q MEMS accelerometer with simultaneous damping control. NEWCAS 2016: 1-4

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