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"Modeling and Simulation of MEMS Capacitive Displacement Sensors."
Mehadi Hasan Ziko, M. Siraj Ghouri, Ants Koel (2020)
- Mehadi Hasan Ziko
, M. Siraj Ghouri, Ants Koel:
Modeling and Simulation of MEMS Capacitive Displacement Sensors. NEMS 2020: 171-175
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