"Robust design of a MEMS gyroscope considering the worst-case tolerance."

Hao Zhou et al. (2010)

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DOI: 10.1109/NEMS.2010.5592587

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Hao Zhou, Hailin Tang, Wei Su, Xianxue Liu:
Robust design of a MEMS gyroscope considering the worst-case tolerance. NEMS 2010: 1012-1016

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