"A continuous-time voltage readout for SiC micromechanical capacitive ..."

Bai-xiang Zheng et al. (2010)

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DOI: 10.1109/NEMS.2010.5592264

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-14

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Bai-xiang Zheng, Wei Tang, Zhe Chen, Haixia Zhang:
A continuous-time voltage readout for SiC micromechanical capacitive pressure sensor. NEMS 2010: 748-751

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