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"Stress in Si-glass anodic bonding and its effect on silicon piezoresistive ..."

Xiaoshan Zheng, Wenshan Chen, Xuyuan Chen (2010)

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DOI: 10.1109/NEMS.2010.5592452

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Xiaoshan Zheng, Wenshan Chen, Xuyuan Chen:
Stress in Si-glass anodic bonding and its effect on silicon piezoresistive pressure sensor. NEMS 2010: 524-527

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