"Micromechanical resonant electrostatic charge sensor with micro-leverage ..."

Jiuxuan Zhao, Hong Ding, Jin Xie (2015)

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DOI: 10.1109/NEMS.2015.7147386

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Jiuxuan Zhao, Hong Ding, Jin Xie:
Micromechanical resonant electrostatic charge sensor with micro-leverage mechanisms. NEMS 2015: 111-115

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