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"Formation of the nano-scale archipelago shape upper electrode of ..."

Jiangang Zhang et al. (2010)

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DOI: 10.1109/NEMS.2010.5592228

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Jiangang Zhang, Xiaoyang Zhu, Zhen Fang, Zhan Zhao:
Formation of the nano-scale archipelago shape upper electrode of capacitive humidity sensor. NEMS 2010: 836-839

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