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"Design of a new 5-DOF flexure-based nanopositioning stage."

Xiaozhi Zhang, Qingsong Xu (2015)

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DOI: 10.1109/NEMS.2015.7147426

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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  dblp key:
  - conf/nems/ZhangX15
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Xiaozhi Zhang, Qingsong Xu:
Design of a new 5-DOF flexure-based nanopositioning stage. NEMS 2015: 276-280

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