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"Development of cluster ion source based on modulated pulse power magnetron ..."
Chuhang Zhang et al. (2013)
- Chuhang Zhang, Hironori Tsunoyama, Hiroki Akatsuka, Hiroki Sekiya, Tomomi Nagase, Atsushi Nakajima:
Development of cluster ion source based on modulated pulse power magnetron sputtering technique. NEMS 2013: 428-431
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