"Achievement of a high-sensitive and high-overload sensor based on the ..."

Zhongliang Yu et al. (2014)

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DOI: 10.1109/NEMS.2014.6908787

access: closed

type: Conference or Workshop Paper

metadata version: 2024-04-10

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Zhongliang Yu, Yulong Zhao, Lili Li, Cun Li, Guanwu Zhou, Bian Tian:
Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure. NEMS 2014: 186-190

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