"Stiction of parylene C to silicon surface measured using blister tests."

Feiqiao Yu et al. (2010)

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DOI: 10.1109/NEMS.2010.5592220

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Feiqiao Yu, Jeffrey Chun-Hui Lin, Po-Jui Chen, Yu-Chong Tai:
Stiction of parylene C to silicon surface measured using blister tests. NEMS 2010: 313-316

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