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"A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with ..."
Yanming Xia et al. (2018)
- Yanming Xia, Tao Wang, Lu Song, Xuanyanz Li, Shenglin Ma, Rongfeng Luo, Jing Chen, Wei Wang, Yufeng Jin:
A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application. NEMS 2018: 304-307
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