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"A position feedback solution based on the acoustic signal produced by ..."

Changfeng Xia et al. (2017)

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DOI: 10.1109/NEMS.2017.8017084

access: closed

type: Conference or Workshop Paper

metadata version: 2017-11-06

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  dblp key:
  - conf/nems/XiaQZSG17
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  - https://dblp.org/rec/conf/nems/XiaQZSG17
Changfeng Xia, Dayong Qiao, Yalong Zhang, Xiaocao Su, Zhounan Guo:
A position feedback solution based on the acoustic signal produced by electrostatically driven MEMS scanning mirror. NEMS 2017: 558-561

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