"Enhancing Sensitivity Using Electrostatic Spring in Coupling ..."

Zheng Wang et al. (2021)

Details and statistics

DOI: 10.1109/NEMS51815.2021.9451485

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-13

a service of  Schloss Dagstuhl - Leibniz Center for Informatics