"A nanochannel system fabricated by MEMS microfabrication and atomic force ..."

Zhiqian Wang et al. (2011)

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DOI: 10.1109/NEMS.2011.6017370

access: closed

type: Conference or Workshop Paper

metadata version: 2025-05-01

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Zhiqian Wang, Dong Wang, Niandong Jiao, Steve Tung, Zaili Dong:
A nanochannel system fabricated by MEMS microfabrication and atomic force microscopy. NEMS 2011: 372-376

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