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"Effect of the Different Substrates and the Film Thickness on the Surface ..."

Chenying Wang et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451331

access: closed

type: Conference or Workshop Paper

metadata version: 2022-11-18

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  dblp key:
  - conf/nems/WangPLJZZHLRJ21
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  - https://dblp.org/rec/conf/nems/WangPLJZZHLRJ21
Chenying Wang, Jiangtao Pu, Lei Li, Weixuan Jing, Yijun Zhang, Yaxin Zhang, Feng Han, Ming Liu, Wei Ren, Zhuangde Jiang:
Effect of the Different Substrates and the Film Thickness on the Surface Roughness of Step Structure. NEMS 2021: 47-50

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