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"A MEMS piezoelectric in-plane resonant accelerometer with two-stage ..."

Yixiang Wang et al. (2016)

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DOI: 10.1109/NEMS.2016.7758289

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Yixiang Wang, Hong Ding, Xianhao Le, Jin Xie:
A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. NEMS 2016: 455-459

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