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"Nanometer-scale flatness and reliability investigation of ..."
Mikael Sterner, Göran Stemme, Joachim Oberhammer (2010)
- Mikael Sterner, Göran Stemme
, Joachim Oberhammer
:
Nanometer-scale flatness and reliability investigation of stress-compensated symmetrically-metallized monocrystalline-silicon multi-layer membranes. NEMS 2010: 959-962

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