"Investigation of charge relaxation of dielectrics for capacitive ..."

Haisheng San et al. (2010)

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DOI: 10.1109/NEMS.2010.5592128

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Haisheng San, Xiaoshan Zheng, Zhiwen Zhao, Gang Li, Xuyuan Chen:
Investigation of charge relaxation of dielectrics for capacitive micro-actuators. NEMS 2010: 1-4

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