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"Microfabrication of hybrid structure composed of rigid silicon and ..."
Sunao Murakami et al. (2017)
- Sunao Murakami, Daisuke Ishihara, Masateru Araki, Tomoyoshi Horie, Naoto Ohira, Takahiro Ito:
Microfabrication of hybrid structure composed of rigid silicon and flexible polyimide membranes. NEMS 2017: 840-843
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