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"Design and fabrication of micro hot-wire flow sensor using 0.35μm ..."

Zhuonan Miao et al. (2014)

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DOI: 10.1109/NEMS.2014.6908810

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-11

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Zhuonan Miao, Christopher Y. H. Chao, Yi Chiu, Chia-Wei Lin, Yi-Kuen Lee:
Design and fabrication of micro hot-wire flow sensor using 0.35μm CMOS MEMS technology. NEMS 2014: 289-293

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