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"Fabrication and characterization of SiC thin films."

Lei Liu et al. (2011)

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DOI: 10.1109/NEMS.2011.6017316

access: closed

type: Conference or Workshop Paper

metadata version: 2018-06-14

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Lei Liu, Wei Tang, Bai-xiang Zheng, Haixia Zhang:
Fabrication and characterization of SiC thin films. NEMS 2011: 146-149

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